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CMOSRFIC平面螺旋电感的集总等效电路英文第26卷第11期2005年11月半导体学报CHINESEJOURNALOFSEMICONDUCTORSVol.26No.11Nov.,2005LumpedEquivalentCircuitofPlanarSpiralInductorforCMOSRFICApplication3ZhaoJixiang(DepartmentofElectronicEngineering,ChinaJiliangUniversity,Hangzhou310018,China)Abstract:Alumpedπ2typeequivalentcircuitofplanarspiralinductorforCMOSRFICapplicationisdevelopedbythedomaindecompositionmethodforconformalmodules(DDM2CM).Closedformexpressionsoflumpedparame2tersforasquarespiralinductoronaSi2SiO2substrateareobtainedandverifiedwiththepreviouslypublishedexperi2mentalresults.Keywords:planarspiralinductors;equivalentcircuit;inductance;qualityfactor;DDM2CMEEACC……