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时间: 2019-12-24 19:32
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几年已广泛使用的单晶硅压力传感器。尽管半导体技术制造的,他们也对电阻的原则运作。在单晶硅半导体(压电效应)的电阻变化是大大高于标准应变计,其电阻变化与几何结构的变化。在掺杂半导体的导电性变化(晶体网格压缩或拉伸),可以由一个非常小的机械变形产生影响。使用温度补偿和放大信号信号调理集成电路,分立电路,提供优越的性能。Maxim>AppNotes>AUTOMOTIVESENSORSIGNALCONDITIONERSKeywords:piezoresistive,pressuresensors,micromachinepressuresensors,pressurecontrolsystems,Dec07,2001monocrystalline,silicontransducer,temperature,pizoresistiveAPPLICATIONNOTE871DemystifyingPiezoresistivePressureSensorsAbstract:Monocrystallinesiliconpressuresensorshavecomeintowideuseinrecentyears.Thoughmanufacturedwithsemiconductortechnology,theyalsooperateontheresistiveprinciple.Theresistancechangeinamonocrystallinesemiconductor(apiezoelectriceffect)issubstantiallyhigherthanthatinstandardstraingauges,whoseresistancechangeswithgeometricalchangesinthestructure.Conductivityinadopedsemiconductorisinfluencedbyachange(compressionorstretch……