标签: kxtf9-1026

KXTF9-1026SpecificationsRev1PARTNUMBER:±2gTri-axisDigitalAccelerometerSpecificationsKXTF9-1026Rev.1Dec-2009ProductDescriptionTheKXTF9isatri-axis+/-2g,+/-4gor+/-8gsiliconmicromachinedaccelerometerwithintegratedorientation,tap/doubletap,andactivitydetectingalgorithms.ThesenseelementisfabricatedusingKionix’sproprietaryplasmamicromachiningprocesstechnology.Accelerationsensingisbasedontheprincipleofadifferentialcapacitancearisingfromacceleration-inducedmotionofthesenseelement,whichfurtherutilizescommonmodecancellationtodecreaseerrorsfromprocessvariation,temperature,andenvironmentalstress.Thesenseelementishermeticallysealedatthewaferlevelbybondingasecondsiliconlidwafertothedeviceusingaglassfrit.AseparateASICdevic……