Introduction to MEMSCourse No. 04813190 MEMS DEVICES AND DESIGN , Spring 2004 Lecture1: Introduction to MEMS Haixia Zhang Institute of Microelectronics, PKU MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU Overview What is MEMS and why MEMS? z The History of MEMS z MEMS Design Items z The future of MEMS z Summary z Homework1 z MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU MEMS Meaning MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU General MEMS Design Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through the utili……