Silicon_Wafer_ProcessingSilicon Wafer Processing
Dr. Seth P. Bates Applied Materials Summer, 2000
Objective
To provide an overview for manufacturing systems students of the steps and processes required to make integrated circuits from blank silicon wafers.
Goals
The Transfer Plan provides a curriculum covering the process of manufacturing integrated circuits from the silicon wafer blanks, using the equipment manufactured by Applied Materials, Lam Research, and others of its competitors. The curriculum will be modular, with each module covering a process in sequence. This curriculum will be developed for internet access.
Outline
Introduction Preparation of the Silicon Wafer Media Silicon Wafer Processing Steps
Silicon Wafer Processing
Outline of Contents
Introduction .........................................……
