【技术应用笔记】用数字控制化MEMS陀螺仪的性能 AN-942 One Technology Way t P.O. Box 9106 t Norwood, MA 02062-9106, U.S.A. t Tel: 781.329.4700 t Fax: 781.461.3113 t www.analog.com MEMS ǖMark Looney ADIS16060 14 MEMS (SPI) ǖ)* ±50°/1 kHz ……