2~8GHz单片可变增益低噪声放大器芯片1 期
杨 荣等: 应变 Si1- x Gex 沟道 PM O SFET 空穴局域化研究
. S olid 2 channel S ta te E lectron ics, 1995; 38 ( 2) : 323
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tica l PM O SFET fab rica ted by Ge ion i m p lan ta tion.
~ 15 IE E E E lectron D ev ice L etters, 1998; 19 ( 1) : 13
3 L am bert A D , L ander R J P, Pa rker E H C , et a l. L ow frequency no ise m ea su rem en ts of P 2channel Si1. Gex Si M O SFET ’s 1999; 46 ( 7) : 1 484 ~ 1 486 4 Yeo Y C. N ano sca le u ltra 2th in 2body silicon 2 on 2in su la2 to r P 2 M O SFET w ith a SiGe Si hetero structu re chan 2 . IE E E E lectron D ev ice L etters, 2000; 21 ( 4) : 161 ~ nel 163 5 TM A M ED IC I U SR ’S M ANU AL , V ER S I ON 4. 0, O ct, 1997 6 Peop le R. B and A lignm en ts of coheren tly stra ined GeSi . A pp l P hy s L ett, 1986; 48 ( 2) : 538 ~ 542 sub stra tes 7 In iew sk ……