Altera Nios II 嵌入式处理器设计大赛2007获奖作品 Laser Direct Writing Digital Servo Controller Based on SOPC Technology Second Prize Laser Direct Writing Digital Servo Controller Based on SOPC Technology Institution: Ultra-Precision Photoelectric Instrument Engineering Research Institute, Harbin Institute of Technology Participants: Lei Yan, Tao Cheng, Ya Gao Instructor: Wang Lei Design Introduction The application of precision/ultra-precision processing technology has expanded from a few areas (such as national defense and aerospace) to different aspects of the national economy. As the semiconductor industry develops, it imposes increasing requirements on laser direct writing lithography, which is the core of very-large-scale integration (VLSI) ma……