本文档中为您介绍了4线电阻率测量基础，包括体电阻率和表面电阻。还将介绍导体电阻率的测量、半导体晶圆的四点共线探测、范德堡测试结构和程序、小功率测量，纳米线电阻率和本征半导体材料测量等应用举例。探讨一些测量方法和误差源，包括测试线和接触电阻的校准，电压失调补偿，噪声源消除，测量仪器的选择，建立时间的预留以及防护以降低漏电流。Characterizing the Resistivity of Materials and Test Structures Using 4-Wire Methods Mary Anne Tupta Keithley Instruments, Inc. A G R E A T E R M E A S U R E O F C O N F I D E N C E 2012 Keithley Instruments, Inc. Resistivity Measurement Overview Definition of electrical resistivity Various 4-wire resistivity methods and test structures Sources of measurement errors and ways to minimize them Key considerations for selecting appropriate instrumentation for optimal results. 2012 Keithley Instruments, Inc. What is the Electrical Resistivity of a Material? The electrical resistance of a material…… is a basic material property defines how well the material will conduct an electric……